Capacitive Vibration-to-electricity Energy Converter with Integrated Mechanical Switches
نویسندگان
چکیده
This paper presents the design of a MEMS capacitive vibration-to-electricity energy converter with integrated mechanical switches for precise timing control. Integrated lateral mechanical contact switches have the advantage of zero leakage current, low energy consumption and synchronous operation. The new design can provide an output power of 31μW at a 40V output voltage from the targeted vibration with an acceleration of 2.25 m/s at 120 Hz. The device is fabricated in SOI wafers. Device fabrication and measurements are presented.
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